Perkin Elmer 2400 Series Sputtering Systems
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Three 6″ Round RF Diode Cathodes.
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Water cooled J-arm Table 6″ O.D.
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RF Power 1 & 2 kW.
- Servo Match Auto Tune.
- Load & Tune Functions.
- RF Forward & Reflected Meters.
- Target Selector Mode Selector.
- Time Power Module
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Table full circle design.
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J-arm Table position selector.
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Auto Pump Sequencing.
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Cryo Pumped.
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Hoist for Sputter Head.
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Other options available.
PE-2400-8SA MULTI TARGET SYSTEM
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Three 8″ Round RF Diode Cathodes.
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Annular Table 21.5″ O.D.
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Variable Speed Drive Motor.
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Anode Cathode Spacing.
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RF Power 1 & 2 kW.
- Servo Match Auto Tune.
- Load & Tune Functions.
- RF Forward & Reflected Meters.
- Target Selector Mode Selector.
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Shutter full circle design.
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Shutter position selector.
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Auto Pump Sequencing.
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Cryo Pumped.
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Hoist for Sputter Head.